NEW INSTRUMENTAL CAPABILITIES IN AUGER-ELECTRON MICROSCOPY

被引：0
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作者：
BOTTOMS, WR
TAYLOR, NJ
SCHOEFFEL, JA
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 02期
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D O I：
10.1116/1.569705
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：786 / 786
页数：1
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