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COMPUTER-AIDED HIGH-SPEED INTERFEROMETRIC X-Y MEASUREMENT

被引：0
|
作者：
SCHEDEWIE, F [1 ]
KOSANKE, K [1 ]
KALLMEYER, M [1 ]
SOLF, B [1 ]
WAGNER, D [1 ]
机构：
[1] IBM CORP, SINDELFINGEN 7032, WEST GERMANY
来源：
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1973年 / 63卷 / 10期
关键词：
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
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页码：1328 / 1328
页数：1
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