MELT FLOW OF THE SILYLATED AREAS DURING THE DESIRE PROCESS

被引：1
|
作者：
WEILL, A
JOUBERT, O
PANIEZ, P
DEBAENE, F
PONS, M
SAGE, D
机构：
[1] France Telecom, CNET, F-38243 Meylan Cedex
[2] Université Claude Bernard de Lyon, F-69622 Villeurbanne Cedex, 43 Bd Du
来源：
MICROELECTRONIC ENGINEERING | 1993年 / 21卷 / 1-4期
关键词：
D O I：
10.1016/0167-9317(93)90066-E
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
[No abstract available]
引用
收藏
页码：251 / 254
页数：4
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