INTERDIFFUSION OF AL AND GA IN (AL,GA)AS/GAAS SUPERLATTICES

被引：34
|
作者：
LEE, JC [1 ]
SCHLESINGER, TE [1 ]
KUECH, TF [1 ]
机构：
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 04期
关键词：
D O I：
10.1116/1.583709
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1187 / 1190
页数：4
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