GROWTH OF EPITAXIAL CO/CU SUPERLATTICES WITH SURFACE ORIENTATIONS OF (111), (100) AND (110) BY DC MAGNETRON SPUTTERING

被引:7
|
作者
KINGETSU, T [1 ]
YOSHIZAKI, F [1 ]
机构
[1] NISSHIN STEEL CO LTD,ADV MAT RES LABS,ICHIKAWA,CHIBA 272,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 4A期
关键词
EPITAXIAL GROWTH; SPUTTER DEPOSITION; CO CU SUPERLATTICE; REFLECTION HIGH-ENERGY ELECTRON DIFFRACTION; SURFACE ORIENTATION; X-RAY DIFFRACTION; GIANT MAGNETORESISTANCE;
D O I
10.1143/JJAP.33.2041
中图分类号
O59 [应用物理学];
学科分类号
摘要
Epitaxial Co/Cu superlattices with three major surface orientations of (111), (100) and (110) were successfully grown by dc magnetron sputter deposition with a base pressure of an ultrahigh vacuum. X-ray diffraction profiles suggested that the structures of the interfaces between Co and Cu layers were diff orient among the (111)-, (100)- and (110)-oriented superlattices even when prepared under the same conditions.
引用
收藏
页码:2041 / 2042
页数:2
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