DIFFRACTION METHOD OF TESTING SURFACE-ROUGHNESS

被引：0
|
作者：
SAKHNO, SP
机构：
来源：
SOVIET JOURNAL OF OPTICAL TECHNOLOGY | 1991年 / 58卷 / 10期
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D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A method is suggested for testing surface roughness, based on an analysis of the spatial-frequency spectrum of coherent radiation scattered by the surface. The results of an experimental verification of the method are presented.
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页码：615 / 619
页数：5
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