PERFORMANCE OF APODIZED APERTURES UNDER PARTIALLY COHERENT ILLUMINATION

被引：6

作者：

JAISWAL, AK ^{[1
]}

BHOGRA, RK ^{[1
]}

机构：

[1] INSTR RES & DEV ESTAB,DEHRA DUN,INDIA

来源：

OPTICA ACTA | 1973年 / 20卷 / 12期

关键词：

D O I：

10.1080/713818735

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

下载

页码：965 / 977

页数：13

共 50 条

[1] EDGE RESPONSE DUE TO APODIZED APERTURES UNDER PARTIALLY COHERENT ILLUMINATION
BHOGRA, RK
JAISWAL, AK
INDIAN JOURNAL OF PURE & APPLIED PHYSICS, 1976, 14 (02) : 131 - 133
[2] PERFORMANCE OF AN APODIZED APERTURE IN A DEFOCUSED OPTICAL SYSTEM UNDER PARTIALLY COHERENT ILLUMINATION
YAMAMOTO, K
ICHIOKA, Y
SUZUKI, T
OPTICA ACTA, 1976, 23 (12): : 965 - 986
[3] FRESNEL DIFFRACTION AND FOCUSING PROPERTIES OF APERTURES UNDER PARTIALLY COHERENT ILLUMINATION
DAURIA, G
SOLIMINI, D
IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION, 1967, AP15 (03) : 480 - +
[4] SUPERRESOLUTION OF PARTIALLY APODIZED APERTURES WITH PARABOLIC FILTERS
PARDHASARADHI, D
RAO, KP
MONDAL, PK
NATIONAL ACADEMY SCIENCE LETTERS-INDIA, 1983, 6 (10): : 353 - 358
[5] DIFFRACTED-FIELD CHARACTERISTICS OF PARTIALLY APODIZED APERTURES
SARADHI, DP
RAO, KP
MONDAL, PK
NATIONAL ACADEMY SCIENCE LETTERS-INDIA, 1979, 2 (08): : 305 - 308
[6] 2-POINT SPARROW OF RESOLUTION WITH PHASE AND ANTIPHASE PARTIALLY COHERENT ILLUMINATION IN APODIZED SYSTEM
MAGIERA, A
PIETRASZKIEWICZ, K
OPTICA APPLICATA, 1981, 11 (02) : 311 - 313
[7] IMAGES OF PERIODIC OBJECTS UNDER PARTIALLY COHERENT ILLUMINATION
JAISWAL, AK
BHOGRA, RK
OPTICA ACTA, 1973, 20 (06): : 469 - 486
[8] IMAGE-FORMATION UNDER PARTIALLY COHERENT ILLUMINATION
GITIN, AV
OPTIKA I SPEKTROSKOPIYA, 1988, 64 (04): : 893 - 896
[9] OPTIMAL BALANCE OF ABERRATIONS UNDER PARTIALLY COHERENT ILLUMINATION
ZHUANG, SL
YU, FTS
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1981, 71 (10) : 1250 - 1254
[10] Analysis of EUVL mask effects under partially coherent illumination
Domnenko, Vitaliy
Schmoeller, Thomas
Klimpel, Thomas
ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES, 2009, 7271

← 1 2 3 4 5 →