STRESS REDUCTION IN ION-BEAM SPUTTERED MIXED-OXIDE FILMS

被引：58
|
作者：
POND, BJ
DEBAR, JI
CARNIGLIA, CK
RAJ, T
机构：
来源：
APPLIED OPTICS | 1989年 / 28卷 / 14期
关键词：
D O I：
10.1364/AO.28.002800
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：2800 / 2805
页数：6
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