WEIGHING CONTROL OF THE AUTOMATIC CRYSTALLIZATION PROCESS FROM THE MELT

被引：14
|
作者：
SATUNKIN, GA
LEONOV, AG
机构：
[1] Institute of Microelectronics Technology and High Purity Materials, Academy of Sciences, the USSR, Moscow District
来源：
JOURNAL OF CRYSTAL GROWTH | 1990年 / 102卷 / 03期
关键词：
D O I：
10.1016/0022-0248(90)90419-L
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
A theoretical analysis of the observability of the crystallization process by Czochralski and LEC methods with weighing control has been developed. The measurement dynamics of weighing crystal or crucible with crystallization under stationary conditions by use of a selfcompensated balance (SCB) has been investigated. The sufficiently of weighing control for full observability in a multichannel system for controlled crystallization is shown. Differences in the methods of weighing based on the analysis of non-ideal sensor-controlled object interaction are revealed and ways of optimizing sensor design are proposed. © 1990.
引用
收藏
页码：592 / 608
页数：17
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