MICROMORPHOLOGY OF GE AND SI1-XGEX LAYERS GROWN ON SI(001) BY SOLUTION EPITAXY AND THE NEGATIVE-DIFFERENTIAL CONDUCTIVITY ON THE GE LAYER

被引:0
|
作者
MUSSIG, HJ [1 ]
KRUGER, D [1 ]
HINRICH, S [1 ]
HANSSON, PO [1 ]
机构
[1] MAX PLANCK INST FESTKORPERFORSCH,D-70569 STUTTGART,GERMANY
来源
关键词
D O I
10.1116/1.587850
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The micromorphology and the electronic structure of heteroepitaxial Ge and Si1-xGex layers grown pseudomorphically by solution epitaxy on Si(001) has been investigated by Auger electron spectroscopy as well as scanning tunneling microscopy (STM) and scanning tunneling spectroscopy. A pure Ge film of 4-5 monolayer thickness typically repeats the structure of the Si substrate surface. A significant decrease of tunneling current at a sample voltage of 1.5 V is observed in areas of 0.5 nm diameter between Ge dimer rows. This decrease is due to a negative-differential conductivity at a tunnel diode configuration consisting of a surface defect structure of the Ge layer and the STM tungsten tip. On Si1-xGex films a strong Ge enrichment was found due to segregation during growth. The high Ge surface concentration on Si1-xGex results in additional surface strain fields and trench formation in the uppermost monolayer.
引用
收藏
页码:1342 / 1347
页数:6
相关论文
共 50 条
  • [1] Second harmonic spectroscopy of Ge/Si(001) and Si1-xGex(001)/Si(001).
    Ekerdt, J
    Parkinson, P
    Downer, MC
    Gravilenko, V
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1999, 218 : U450 - U450
  • [2] GE SEGREGATION AT SI/SI1-XGEX INTERFACES GROWN BY MOLECULAR-BEAM EPITAXY
    ZALM, PC
    VANDEWALLE, GFA
    GRAVESTEIJN, DJ
    VANGORKUM, AA
    APPLIED PHYSICS LETTERS, 1989, 55 (24) : 2520 - 2522
  • [3] Second-harmonic spectroscopy of Ge/Si(001) and Si1-xGex(001)/Si(001)
    Parkinson, PS
    Lim, D
    Büngener, R
    Ekerdt, JG
    Downer, MC
    APPLIED PHYSICS B-LASERS AND OPTICS, 1999, 68 (03): : 641 - 648
  • [4] Second-harmonic spectroscopy of Ge/Si(001) and Si1-xGex(001)/Si(001)
    P.S. Parkinson
    D. Lim
    R. Büngener
    J.G. Ekerdt
    M.C. Downer
    Applied Physics B, 1999, 68 : 641 - 648
  • [5] Special features of the formation of Ge(Si) islands on the relaxed Si1-xGex/Si(001) buffer layers
    Vostokov, N. V.
    Drozdov, Yu. N.
    Krasil'nik, Z. F.
    Kuznetsov, O. A.
    Lobanov, D. N.
    Novikov, A. V.
    Shaleev, M. V.
    SEMICONDUCTORS, 2006, 40 (02) : 229 - 233
  • [6] NEGATIVE-DIFFERENTIAL CONDUCTIVITY MEASURED ON A GERMANIUM LAYER ON SI(001)
    MUSSIG, HJ
    KRUGER, D
    HINRICH, S
    HANSSON, PO
    SURFACE SCIENCE, 1994, 314 (03) : L884 - L888
  • [7] Special features of the photoluminescence of self-assembled Ge(Si)/Si(001) islands grown on a strained Si1-xGex layer
    Drozdov, Yu. N.
    Krasil'nik, Z. F.
    Lobanova, D. N.
    Novikov, A. V.
    Shaleev, M. V.
    Yablonskii, A. N.
    SEMICONDUCTORS, 2006, 40 (03) : 338 - 341
  • [8] STRICT THERMAL NITRIDATION SELECTIVITY BETWEEN SI AND GE USED AS A CHEMICAL PROBE OF THE OUTERMOST LAYER OF SI1-XGEX ALLOYS AND GE/SI(001) OR SI/GE(001) HETEROSTRUCTURES
    AUBEL, D
    DIANI, M
    BISCHOFF, JL
    BOLMONT, D
    KUBLER, L
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (04): : 2699 - 2704
  • [9] Phonon strain-shift coefficients of Si1-xGex grown on Ge(001)
    Stoehr, M
    Aubel, D
    Juillaguet, S
    Bischoff, JL
    Kubler, L
    Bolmont, D
    Hamdani, F
    Fraisse, B
    Fourcade, R
    PHYSICAL REVIEW B, 1996, 53 (11): : 6923 - 6926
  • [10] Kinetics of Si incorporation into a Ge matrix for Si1-xGex layers grown by chemical vapor deposition
    Tomasini, P
    Bauer, M
    Cody, N
    Arena, C
    JOURNAL OF APPLIED PHYSICS, 2006, 99 (07)