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- [1] Characterization of titanium etching in Cl-2/N-2 plasmasJOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1997, 144 (05) : 1780 - 1784Muthukrishnan, AMAmberiadis, KElshabiniRiad, A
- [2] ECR etching of GaP, GaAs, InP, and InGaAs in Cl-2/Ar, Cl-2/N-2, BCl3/Ar, and BCl3/N-2COMPOUND SEMICONDUCTOR ELECTRONICS AND PHOTONICS, 1996, 421 : 245 - 250Shul, RJBaca, AGRieger, DJHou, HPearton, SJRen, F
- [3] Quantum speed losses of slow electrons in N-2ANNALEN DER PHYSIK, 1931, 9 (08) : 1004 - 1016Lohner, H
- [4] TOTAL CROSS-SECTIONS FOR POSITRONS AND ELECTRONS COLLIDING WITH N-2, CO AND CO2 MOLECULESJOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1984, 53 (08) : 2491 - 2500SUEOKA, OMORI, S
- [5] LOW ION ENERGY ECR ETCHING OF INP USING CL-2/N-2 MIXTURECOMPOUND SEMICONDUCTORS 1994, 1995, (141): : 329 - 334MIYAKUNI, SHATTORI, RSATO, KISHIHARA, O
- [6] CHLORINE-L ABSORPTION CROSS-SECTIONS OF GASEOUS HCL AND CL-2JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS, 1981, 14 (11) : 1777 - 1790NINOMIYA, KISHIGURO, EIWATA, SMIKUNI, ASASAKI, T
- [7] RATE COEFFICIENTS AND INELASTIC MOMENTUM-TRANSFER CROSS-SECTIONS FOR ELECTRONIC EXCITATION OF N-2 BY ELECTRONSBULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1978, 23 (02): : 143 - 143CARTWRIGHT, DC
- [8] MEASUREMENT OF (N,N-2) AND (N,N-3) CROSS-SECTIONSBULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1975, 20 (09): : 1196 - 1196VEESER, LRARTHUR, ED
- [9] Total cross sections for electron capture in slow Arq+/N-2 (q = 6, 8) collisionsPHYSICA SCRIPTA, 1997, T73 : 280 - 281Remscheid, ANadzeyka, AWiesemann, K
- [10] Calculation of cross sections for rovibrational excitation of N-2 by electron impactJOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS, 1996, 29 (03) : L105 - L112GrimmBosbach, TThummel, HTNesbet, RKPeyerimhoff, SD