PHYSICAL AND ELECTRICAL-PROPERTIES OF YTTRIA-STABILIZED ZIRCONIA EPITAXIAL THIN-FILMS DEPOSITED BY ION-BEAM SPUTTERING ON SILICON

被引：40
|
作者：
PELLET, C
SCHWEBEL, C
HESTO, P
机构：
来源：
THIN SOLID FILMS | 1989年 / 175卷
关键词：
D O I：
10.1016/0040-6090(89)90803-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：23 / 28
页数：6
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