INFLUENCE OF CRYSTALLIZATION MECHANISM ON DIFFUSION OF BORON IN EPITAXIAL LAYERS OF SILICON - GERMANIUM SOLID-SOLUTIONS

被引：0
|
作者：
LYUTOVICH, KL
GIMELFAR.FA
ORLOV, PB
UKHORSKA.TA
机构：
[1] ACAD SCI UZSSR, ELECTR INST, TASHKENT, UZSSR
[2] STATE SCI RES RARE MET IND INST, MOSCOW, USSR
来源：
KRISTALLOGRAFIYA | 1973年 / 18卷 / 06期
关键词：
D O I：
暂无
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
引用
收藏
页码：1309 / 1311
页数：3
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