SIOX/TAOX GATE INSULATOR A-SI TFT FOR LIQUID-CRYSTAL DISPLAYS

被引：6
|
作者：
IKEDA, M
DOHJO, M
AOKI, T
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷 / 09期
关键词：
D O I：
10.1143/JJAP.26.1565
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1565 / 1567
页数：3
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