GROWTH OF C-AXIS ORIENTED ZNO THIN-FILMS WITH HIGH DEPOSITION RATE ON SILICON BY CVD METHOD

被引：35
|
作者：
SHIMIZU, M
SHIOSAKI, T
KAWABATA, A
机构：
来源：
JOURNAL OF CRYSTAL GROWTH | 1982年 / 57卷 / 01期
关键词：
D O I：
10.1016/0022-0248(82)90253-6
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
引用
收藏
页码：94 / 100
页数：7
相关论文
共 50 条
  • [1] LOW-TEMPERATURE GROWTH OF HIGHLY TRANSPARENT C-AXIS ORIENTED ZNO THIN-FILMS BY PULSED-LASER DEPOSITION
    AMIRHAGHI, S
    CRACIUN, V
    CRACIUN, D
    ELDERS, J
    BOYD, IW
    [J]. MICROELECTRONIC ENGINEERING, 1994, 25 (2-4) : 321 - 326
  • [2] PREPARATION OF C-AXIS ORIENTED ZNO THIN-FILMS BY THE PYROSOL PROCESS FOR MICROSENSORS APPLICATIONS
    DESCHANVRES, JL
    BOCHU, B
    JOUBERT, JC
    [J]. JOURNAL DE PHYSIQUE III, 1994, 4 (07): : 1243 - 1251
  • [3] METALORGANIC CHEMICAL VAPOR-DEPOSITION OF C-AXIS ORIENTED PZT THIN-FILMS
    OKADA, M
    TOMINAGA, K
    ARAKI, T
    KATAYAMA, S
    SAKASHITA, Y
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 (04): : 718 - 722
  • [4] Pulsed laser deposition of c-axis oriented aluminum nitride thin films on silicon
    Tabbal, M
    Mérel, P
    Chaker, M
    Pépin, H
    [J]. EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2001, 14 (02): : 115 - 119
  • [5] C-AXIS ORIENTED GROWTH OF MAGNETRON SPUTTERED YBACUO THIN-FILMS ON MGO SUBSTRATES
    HAUSER, B
    KEIM, EG
    ROGALLA, H
    VANSILFHOUT, A
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1988, 46 (04): : 339 - 341
  • [6] Synthesis of Transparent and Highly c-Axis Oriented ZnO Thin Films
    Shishodiat, P. K.
    Kim, H. J.
    Wakahara, A.
    [J]. E-JOURNAL OF SURFACE SCIENCE AND NANOTECHNOLOGY, 2014, 12 : 334 - 338
  • [7] PIEZOELECTRICITY OF C-AXIS ORIENTED PBTIO3 THIN-FILMS
    KUSHIDA, K
    TAKEUCHI, H
    [J]. APPLIED PHYSICS LETTERS, 1987, 50 (25) : 1800 - 1801
  • [8] REDUCED PRESSURE MOCVD OF C-AXIS ORIENTED BISRCACUO THIN-FILMS
    HAMAGUCHI, N
    VIGIL, J
    GARDINER, R
    KIRLIN, PS
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1990, 29 (04): : L596 - L599
  • [9] Growth of highly c-axis oriented ZnO thin films by spray pyrolysis for piezoelectric applications
    Ramos-Serrano, J. R.
    Alcantara-Iniesta, S.
    Acosta-Osorno, M.
    Estela Calixto, Ma
    [J]. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2022, 144
  • [10] Alternate layer deposition method for the deposition of c-axis oriented hexagonal barium ferrite thin films
    Hoshi, Y
    Shinozaki, K
    Shimizu, H
    Kato, K
    Kaneko, F
    [J]. JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1998, 177 : 241 - 242
12345