EFFECT OF MOBILITY OF METAL ATOMS ON STRUCTURE OF THIN FILMS DEPOSITED AT OBLIQUE INCIDENCE

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作者：
VANDEWATERBEEMD, JG
VANOOSTE.GW
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来源：
PHILIPS RESEARCH REPORTS | 1967年 / 22卷 / 04期
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
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页码：375 / +
页数：1
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