THRESHOLD SPUTTERING EFFECTS IN A CU-AU ALLOY

被引：11
|
作者：
NELSON, GC [1 ]
BASTASZ, R [1 ]
机构：
[1] SANDIA NATL LABS,DIV PHYS RES,LIVERMORE,CA 94550
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 03期
关键词：
D O I：
10.1116/1.571416
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：498 / 501
页数：4
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