RECENT PROGRESS IN SPECKLE METROLOGY

被引:0
|
作者
YAMAGUCHI, I
机构
关键词
LASER INTERFEROMETRY; LASER SPECKLE; DEFORMATION MEASUREMENT; IMAGE PROCESSING; OPTICAL MEASUREMENT; STRAIN MEASUREMENT; OPTICAL ENCODERS;
D O I
暂无
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
Speckle patterns, which arise from random interference of laser light diffusely reflected from rough surfaces, can be utilized as random markings of the surface for noncontact and sensitive measurement of displacement and strain of the surface. After basic properties of the speckle patterns and their application fields are surveyed, recent progress in speckle methods aimed at displacement and strain measurement is discussed. The topics are concerned with speckle photography, electronic speckle correlation, and TV speckle interferometry. Examples of quantitative and automatic measurement using electronic signal processing in the above techniques are described.
引用
收藏
页码:89 / 95
页数:7
相关论文
共 50 条
  • [1] Recent progress of EUV wavefront metrology in EUVA
    Hasegawa, M
    Ouchi, C
    Hasegawa, T
    Kato, S
    Ohkubo, A
    Suzuki, A
    Sugisaki, K
    Okada, M
    Otaki, K
    Murakami, K
    Saito, J
    Niibe, M
    Takeda, M
    [J]. ADVANCES IN MIRROR TECHNOLOGY FOR X-RAY, EUV LITHOGRAPHY, LASER, AND OTHER APPLICATIONS II, 2004, 5533 : 27 - 36
  • [2] Recent progress in high pressure metrology in Europe
    Sabuga, Wladimir
    Prazak, Dominik
    Rabault, Thierry
    [J]. 16TH INTERNATIONAL CONGRESS OF METROLOGY, 2014, 77
  • [3] Recent progress in picosecond ultrasonic process metrology
    Stoner, RJ
    Morath, CJ
    Tas, G
    Mair, R
    Merchant, SM
    Maris, HJ
    [J]. CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY 2000, INTERNATIONAL CONFERENCE, 2001, 550 : 468 - 477
  • [4] Speckle Metrology
    Doval, Angel F.
    Trillo, Cristina
    Carlos Lopez-Vazquez, Jose
    [J]. OPTICAL ENGINEERING, 2013, 52 (10)
  • [5] Speckle Metrology
    Mendoza Santoyo, Fernando
    Georges, Marc
    Lehmann, Peter
    Osten, Wolfgang
    Armando, Albertazzi G., Jr.
    [J]. OPTICAL ENGINEERING, 2016, 55 (12)
  • [6] Speckle Displacement in Holographic and Speckle Metrology
    Yamaguchi, Ichirou
    Kobayshi, Koichi
    [J]. 22ND CONGRESS OF THE INTERNATIONAL COMMISSION FOR OPTICS: LIGHT FOR THE DEVELOPMENT OF THE WORLD, 2011, 8011
  • [7] SHADOW SPECKLE METROLOGY
    GILBERT, JA
    MATTHYS, DR
    TAHER, MA
    PETERSEN, ME
    [J]. APPLIED OPTICS, 1986, 25 (02): : 199 - 203
  • [8] SPECKLE METHODS IN METROLOGY
    TRIBILLON, G
    [J]. OPTICA ACTA, 1977, 24 (08): : 877 - 891
  • [9] THE RANGE OF SPECKLE METROLOGY
    PARKS, VJ
    [J]. EXPERIMENTAL MECHANICS, 1980, 20 (06) : 181 - 191
  • [10] RANGE OF SPECKLE METROLOGY
    PARKS, VJ
    [J]. EXPERIMENTAL MECHANICS, 1979, 19 (05) : N43 - N43