ION CHANNELING IN TEXTURED POLYCRYSTALLINE DIAMOND FILMS

被引：7
|
作者：
SAMLENSKI, R
FLEMIG, G
BRENN, R
WILD, C
MULLERSEBERT, W
KOIDL, P
机构：
[1] UNIV FREIBURG,FREIBURGER MAT FORSCHUNGSZENTRUM,W-7800 FREIBURG,GERMANY
[2] FRAUNHOFER INST APPL SOLID STATE PHYS,W-7800 FREIBURG,GERMANY
来源：
JOURNAL OF APPLIED PHYSICS | 1993年 / 74卷 / 03期
关键词：
D O I：
10.1063/1.354741
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Channeling of H+ and H-2+ ions of energies between 1.0 and 2.0 MeV in [100]-textured polycrystalline diamond films grown by microwave plasma-assisted chemical-vapor deposition has been observed with Rutherford backscattering. The width of the orientational distribution of the diamond crystallites as deduced from the measured projectile velocity dependence of the observed channeling angular scans amounted to about 1-degrees.
引用
收藏
页码：2134 / 2136
页数：3
相关论文
共 50 条
  • [1] CHARACTERIZATION OF STRUCTURE AND DEFECTS IN TEXTURED DIAMOND FILMS BY ION CHANNELING
    SAMLENSKI, R
    FLEMIG, G
    BRENN, R
    WILD, C
    MULLERSEBERT, W
    KOIDL, P
    [J]. DIAMOND AND RELATED MATERIALS, 1994, 3 (08) : 1091 - 1096
  • [2] QUANTITATIVE TEXTURE AND DEFECT ANALYSIS OF POLYCRYSTALLINE DIAMOND FILMS BY ION CHANNELING
    SAMLENSKI, R
    BRENN, R
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 86 (3-4): : 339 - 344
  • [3] Morphological Specific Features of (100)-Textured Polycrystalline Diamond Films
    Alexeev, A. M.
    Ismagilov, R. R.
    Obraztsov, A. N.
    [J]. CRYSTALLOGRAPHY REPORTS, 2020, 65 (01) : 152 - 158
  • [4] Morphological Specific Features of (100)-Textured Polycrystalline Diamond Films
    A. M. Alexeev
    R. R. Ismagilov
    A. N. Obraztsov
    [J]. Crystallography Reports, 2020, 65 : 152 - 158
  • [5] Stresses in textured and polycrystalline cubic films by Raman spectroscopy: Application to diamond
    Gries, T.
    Vandenbulcke, L.
    Simon, P.
    Canizares, A.
    [J]. Journal of Applied Physics, 2007, 102 (08):
  • [6] Stresses in textured and polycrystalline cubic films by Raman spectroscopy: Application to diamond
    Gries, T.
    Vandenbulcke, L.
    Simon, P.
    Canizares, A.
    [J]. JOURNAL OF APPLIED PHYSICS, 2007, 102 (08)
  • [7] EFFECTS OF ION-IMPLANTATION ON POLYCRYSTALLINE DIAMOND FILMS
    ZHANG, XK
    GUO, JG
    YAO, YF
    FANG, F
    [J]. VACUUM, 1992, 43 (11) : 1047 - 1049
  • [8] EVIDENCE OF RECONSTRUCTION OF (111)/(100)-TEXTURED, POLYCRYSTALLINE DIAMOND FILMS BY SEM TRIBOMETRY
    GARDOS, MN
    [J]. CARBON, 1990, 28 (06) : 783 - 784
  • [9] The nature of ion-implanted contacts to polycrystalline diamond films
    Avigal, Y
    Richter, V
    Fizgeer, B
    Saguy, C
    Kalish, R
    [J]. DIAMOND AND RELATED MATERIALS, 2004, 13 (09) : 1674 - 1679
  • [10] (001)-textured growth of diamond films on polycrystalline diamond substrates by bias-assisted chemical vapor deposition
    Zhang, WJ
    Jiang, X
    Klages, CP
    [J]. JOURNAL OF CRYSTAL GROWTH, 1997, 171 (3-4) : 485 - 492
12345