LASER CHEMICAL VAPOR-DEPOSITION OF METALS AND INSULATORS

被引：33

|

作者：

ALLEN, SD

BASS, M

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 02期

关键词：

D O I：

10.1116/1.569967

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：431 / 431

页数：1

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