EFFECTS OF OXIDATION ON ELECTRICAL CHARACTERISTICS OF SILICON-ON-SAPPHIRE FILMS

被引：27
|
作者：
ROSS, EC
WARFIELD, G
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1969年 / 40卷 / 05期
关键词：
D O I：
10.1063/1.1657985
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：2339 / &
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