PHOTO-ASSISTED ANISOTROPIC ETCHING OF PHOSPHORUS-DOPED POLYCRYSTALLINE SILICON EMPLOYING REACTIVE SPECIES GENERATED BY A MICROWAVE-DISCHARGE

被引：23
|
作者：
HAYASAKA, N
OKANO, H
SEKINE, M
HORIIKE, Y
机构：
来源：
APPLIED PHYSICS LETTERS | 1986年 / 48卷 / 17期
关键词：
D O I：
10.1063/1.96458
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1165 / 1166
页数：2
相关论文
共 7 条
  • [1] SYNCHROTRON RADIATION-ASSISTED ETCHING OF SI IN THE PRESENCE OF REACTIVE SPECIES PRODUCED BY MICROWAVE-DISCHARGE
    TERAKADO, S
    KITAMURA, O
    SUZUKI, S
    TANAKA, K
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (05): : 1890 - 1894
  • [2] CONTRAST ENHANCEMENT PATTERN TRANSFER ETCHING OF PHOSPHORUS-DOPED POLYCRYSTALLINE SILICON
    HAYASAKA, N
    NAKAHARA, H
    OKANO, H
    HORIIKE, Y
    APPLIED PHYSICS LETTERS, 1987, 51 (17) : 1328 - 1330
  • [3] SYNCHROTRON-RADIATION EXCITED ETCHING OF SIC FILM USING REACTIVE SPECIES GENERATED BY A MICROWAVE-DISCHARGE
    TERAKADO, SG
    OGURA, M
    SUZUKI, S
    TANAKA, K
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1994, 12 (02): : 379 - 383
  • [4] SYNCHROTRON RADIATION ENHANCED ETCHING OF PHOSPHORUS DOPED POLYCRYSTALLINE SILICON EMPLOYING CL2 GAS
    HAYASAKA, N
    OKANO, H
    HORIIKE, Y
    HIRAYA, A
    SHOBATAKE, K
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (8B) : C455 - C455
  • [5] EXTREMELY HIGH-SELECTIVE ELECTRON-CYCLOTRON RESONANCE PLASMA-ETCHING FOR PHOSPHORUS-DOPED POLYCRYSTALLINE SILICON
    SAMUKAWA, S
    SUZUKI, Y
    SASAKI, M
    APPLIED PHYSICS LETTERS, 1990, 57 (04) : 403 - 405
  • [6] HIGHLY SELECTIVE ETCHING OF SI3N4 TO SIO2 EMPLOYING F, CL ATOMS GENERATED BY MICROWAVE-DISCHARGE
    SUTO, S
    HAYASAKA, N
    OKANO, H
    HORIIKE, Y
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (8B) : C453 - C453
  • [7] HIGHLY SELECTIVE ETCHING OF SI3N4 TO SIO2 EMPLOYING FLUORINE AND CHLORINE ATOMS GENERATED BY MICROWAVE-DISCHARGE
    SUTO, S
    HAYASAKA, N
    OKANO, H
    HORIIKE, Y
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1989, 136 (07) : 2032 - 2034
1