ENERGY-DEPENDENCE OF EXCITATION IN SPUTTERING

被引：13
|
作者：
BHATTACHARYA, RS [1 ]
HASSELKAMP, D [1 ]
SCHARTNER, KH [1 ]
机构：
[1] UNIV GIESSEN,INST PHYS 1,D-6300 GIESSEN,FED REP GER
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1979年 / 12卷 / 05期
关键词：
D O I：
10.1088/0022-3727/12/5/004
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：L55 / L59
页数：5
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