共 50 条
- [1] REACTION PROBABILITY FOR THE SPONTANEOUS ETCHING OF SILICON BY CF3 FREE-RADICALS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06): : 1632 - 1640
- [3] Shock Wave Study of the Thermal Decomposition of CF3 and CF2 Radicals JOURNAL OF PHYSICAL CHEMISTRY A, 2010, 114 (14): : 4755 - 4761
- [4] REACTIONS OF CF3 RADICALS WITH PERFLUOROACETONE JOURNAL OF CHEMICAL PHYSICS, 1962, 36 (05): : 1330 - &
- [5] REACTION OF CF3 RADICALS WITH METHYLCHLOROSILANES CANADIAN JOURNAL OF CHEMISTRY, 1970, 48 (08): : 1209 - &
- [6] KINETICS OF RECOMBINATION OF CF3 RADICALS REACTION KINETICS AND CATALYSIS LETTERS, 1979, 11 (03): : 265 - 269
- [7] Spatial distribution and surface loss of CF3 and CF2 radicals in a CF4 etching plasma Hikosaka, Yukinobu, 1600, (32):
- [8] SPATIAL-DISTRIBUTION AND SURFACE LOSS OF CF3 AND CF2 RADICALS IN A CF4 ETCHING PLASMA JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1993, 32 (3A): : L353 - L356