ORGANIC THIN-FILMS FOR SEMICONDUCTOR WAFER DIAGNOSTICS

被引：0
|
作者：
FORREST, SR
KAPLAN, ML
SCHMIDT, PH
机构：
[1] UNIV SO CALIF,DEPT ELECTROPHYS & MAT SCI,LOS ANGELES,CA 90089
[2] AT&T BELL LABS,MURRAY HILL,NJ 07974
[3] DIGITAL EQUIPMENT CORP,HUDSON,MA 01749
来源：
ANNUAL REVIEW OF MATERIALS SCIENCE | 1987年 / 17卷
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：189 / 217
页数：29
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