SURFACE PROFILE MEASUREMENT DURING TURNING USING FRINGE-FIELD CAPACITIVE PROFILOMETRY

The use of fringe-field capacitive sensing for surface profile measurement during the turning process is described. Measurements of the local surface height are inferred from variations in a fringe electric field induced between the sensing element and the workpiece. The surface profile is determined from high-speed scanning of the sensing element across the surface. The technique is particularly well-suited to the relatively harsh environment of in-process measurement. We have implemented a system in which profile measurements are made continuously, in real-time, and immediately adjacent to the cutting tool. The results of tests conducted to determine the accuracy and sensitivity of this capacitive profilometer are presented. In-process measurements of surfaces generated by turning with roughness in the range of 0.3 to 4.0-mu-m were made. Comparisons with static profile measurements made using standard stylus instrumentation are presented, and show quantitative agreement.