AMORPHOUS METALS AND ION-IMPLANTATION

被引：72
|
作者：
GRANT, WA [1 ]
机构：
[1] HC ORSTED INST,PHYS LAB 2,DK-2100 COPENHAGEN,DENMARK
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 05期
关键词：
D O I：
10.1116/1.569822
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1644 / 1649
页数：6
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