SYNTHESIS OF SUPERCONDUCTING Y-BA-CU-O THIN-FILMS BY IONIZED CLUSTER BEAM CODEPOSITION

被引：7
|
作者：
YAMANISHI, K [1 ]
YASUNAGA, S [1 ]
KAWAGOE, Y [1 ]
SATO, K [1 ]
IMADA, K [1 ]
机构：
[1] MITSUBISHI ELECT CORP,MAT & ELECTR DEVICES LAB,AMAGASAKI,HYOGO 661,JAPAN
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 37-8卷
关键词：
D O I：
10.1016/0168-583X(89)90329-7
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：930 / 934
页数：5
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