ENHANCEMENT OF DIFFRACTION GRATING EFFICIENCIES IN THE SOFT-X-RAY REGION BY A MULTILAYER COATING

This paper shows that an optimized multilayer coating on the premirror and on the grating of a grazing incidence mono-chromator would improve the transmission up to an order of magnitude for a special scan mode. The measured reflectivities for this three-period multilayer coating are compared to those for a thin gold film. For both objects the reflectivities can successfully be calculated using recently published optical constants and taking into account the surface roughness. Evaporated onto a blazed grating an identical multilayer improves the efficiency at the anticipated working points just as expected from intuitive arguments.