ILLUMINATION EFFECTS ON IMAGE-FORMATION IN X-RAY PROXIMITY PRINTING

被引：13
|
作者：
VLADIMIRSKY, Y
MALDONADO, JR
机构：
[1] IBM, Hopewell Junction, United States
来源：
MICROELECTRONIC ENGINEERING | 1991年 / 13卷 / 1-4期
关键词：
D O I：
10.1016/0167-9317(91)90108-P
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Image intensity profile calculations using the XMAS simulation program are presented for storage ring X-ray lithography proximity printing under several illumination conditions. The calculations indicate considerable widening of the process window for simultaneous replication of several kinds of submicron features by decreasing the image coherence using various techniques.
引用
收藏
页码：343 / 346
页数：4
相关论文
共 50 条
  • [1] Illumination effects on image formation in X-ray proximity printing
    Vladimirsky, Y.
    Maldonado, J.R.
    [J]. Proceedings of the International Conference on Microlithography, 1991,
  • [2] DIFFRACTION EFFECTS AND IMAGE BLURRING IN X-RAY PROXIMITY PRINTING
    DUBNER, AD
    WAGNER, A
    LEVIN, JP
    MAUER, J
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06): : 3212 - 3216
  • [3] DIFFRACTION EFFECTS IN X-RAY PROXIMITY PRINTING
    DUBNER, AD
    WAGNER, A
    LEVIN, JP
    MAUER, J
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (05): : 2234 - 2242
  • [4] PARTIALLY COHERENT IMAGE-FORMATION WITH X-RAY MICROSCOPES
    JOCHUM, L
    MEYERILSE, W
    [J]. APPLIED OPTICS, 1995, 34 (22): : 4944 - 4950
  • [5] IMAGE-FORMATION UNDER PARTIALLY COHERENT ILLUMINATION
    GITIN, AV
    [J]. OPTIKA I SPEKTROSKOPIYA, 1988, 64 (04): : 893 - 896
  • [6] IMAGE-FORMATION IN X-RAY-LITHOGRAPHY - PROCESS OPTIMIZATION
    CERRINA, F
    GUO, JZY
    TURNER, S
    OCOLA, L
    KHAN, M
    ANDERSON, P
    [J]. MICROELECTRONIC ENGINEERING, 1992, 17 (1-4) : 135 - 140
  • [7] Geometry or x-ray point source proximity printing .2. Overlay effects
    Hollanda, PA
    [J]. ELECTRON-BEAM, X-RAY, EUV, AND ION-BEAM SUBMICROMETER LITHOGRAPHIES FOR MANUFACTURING VI, 1996, 2723 : 332 - 338
  • [8] A NEW PERSPECTIVE ON PROXIMITY PRINTING - FROM ULTRAVIOLET TO X-RAY
    LIN, BJ
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (06): : 1539 - 1546
  • [9] NOVEL PROXIMITY X-RAY IMAGE INTENSIFIER TUBE
    WANG, SP
    ROBBINS, CD
    BATES, CW
    [J]. AMERICAN JOURNAL OF ROENTGENOLOGY, 1978, 130 (02) : 384 - 384
  • [10] IMAGE-FORMATION IN NON-IMPACT PRINTING ON PAPER
    OITTINEN, P
    SAARELMA, H
    [J]. PAPERI JA PUU-PAPER AND TIMBER, 1985, 67 (04): : 274 - &
12345