IMPROVEMENT OF THE GAS EFFICIENCY IN A MICROWAVE PLASMA CATHODE TYPE OXYGEN-ION SOURCE

被引：2
|
作者：
MIYAKE, K [1 ]
MIKAMI, T [1 ]
TAHARA, H [1 ]
OGATA, K [1 ]
MATSUBARA, Y [1 ]
NOGAWA, S [1 ]
ISHIKAWA, J [1 ]
机构：
[1] KYOTO UNIV,DEPT ELECTR,SAKYO KU,KYOTO 615,JAPAN
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1994年 / 65卷 / 04期
关键词：
D O I：
10.1063/1.1144995
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A microwave plasma (MP) cathode for ion sources has advantages of a long lifetime for reactive gas, and a capability of a high-current electron emission of several amperes. This article describes a new MP cathode, in which a convergent magnetic field is formed at an electron emitting aperture in order to improve the working gas efficiency, that is the decreasing of the gas flow rate (Q(eff)) to obtain the electron emission current of 1 A. By applying a magnetic field (approximately 3 kG), the Q(eff) was decreased to 1/5 to 1/10 of that in the conventional MP cathode, and a high current of oxygen ion beam of 62 mA in a high vacuum (1.8 X 10(-5) Torr) system was successfully obtained. Further improvements are expected by changing various parameters.
引用
收藏
页码：1313 / 1315
页数：3
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