USE OF MI-1305 MASS SPECTROMETER TO STUDY ION-SPUTTERING PRODUCTS

被引：0
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作者：
MARCHENK.RI
STEPKO, II
SHKURDOD.VF
ANTONYUK, ND
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来源：
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES-USSR | 1969年 / 04期
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T [工业技术];
学科分类号：
08 ;
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页码：964 / &
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