LOW-VOLTAGE SCANNING ELECTRON-MICROSCOPY FOR THE FAILURE ANALYSIS OF VLSI DEVICES

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作者：

JONES, DR

WOODWARD, M

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来源：

INSTITUTE OF PHYSICS CONFERENCE SERIES | 1990年 / 98期

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中图分类号：

O4 [物理学];

学科分类号：

0702 ;

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页码：459 / 464

页数：6

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