A ROOM-TEMPERATURE METHOD FOR THE PREPARATION OF ULTRATHIN SIOX FILMS FROM LANGMUIR-BLODGETT LAYERS

被引：93
|
作者：
MIRLEY, CL
KOBERSTEIN, JT
机构：
[1] Department of Chemical Engineering, Institute of Materials Science U-136, University of Connecticut, Storrs, Connecticut
来源：
LANGMUIR | 1995年 / 11卷 / 04期
关键词：
D O I：
10.1021/la00004a001
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Langmuir-Blodgett films prepared from diacid-terminated poly(dimethylsiloxane) can be transformed to SiOx ultrathin films (t = 14 Angstrom) by exposure to UV-ozone at room temperature and atmospheric pressure. The kinetics of the reaction is followed by grazing-incidence infrared spectroscopy and the film composition is determined by angle-resolved X-ray photoelectron spectroscopy. The results show that UV-ozone treatment oxidizes 90% of the methyl side groups to hydroxyl and bridging oxygen species. This technique represents a novel low temperature route for the preparation of ultrathin SiOx films from polysiloxane starting materials.
引用
收藏
页码：1049 / 1052
页数：4
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