SILICON-WAFERS SELF-BONDING

被引：2

作者：

MISEREY, F

机构：

来源：

REVUE DE PHYSIQUE APPLIQUEE | 1990年 / 25卷 / 07期

关键词：

D O I：

10.1051/rphysap:01990002507076300

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：763 / 773

页数：11

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