IMAGING IN AN OPTICAL PROJECTION SYSTEM WITH A LASER-LIGHT SOURCE .1. GAUSSIAN LASER-LIGHT ILLUMINATION

Intensity distributions for a line-and-space pattern with 5 lines are calculated using a one-dimensional model. Their dependence on Gaussian laser light illumination is analyzed. The laser light travels distance z and illuminates a second light source plane for an illumination system. The complex coherence factor mu(12) at the object plane has an absolute value of 1, but a change in the phase of mu(12) becomes greater with increasing distance z or coherence factor sigma(c). Compared with imaging in incoherent light source systems, intensity distributions at the image plane are more easily varied depending on z and sigma(c), and focal tolerance is narrower.