ELECTRICAL CHARACTERIZATION OF ION-IMPLANTATION INTO GAAS - TOPOGRAPHY AND DEPTH PROFILES

被引：2
|
作者：
LOOK, DC
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 10期
关键词：
D O I：
10.1149/1.2100236
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：2527 / 2533
页数：7
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