ELECTRON-ENERGY DISTRIBUTION-FUNCTIONS IN RADIO-FREQUENCY COLLISION DOMINATED NITROGEN DISCHARGES

被引：24

作者：

CAPITELLI, M ^{[1
]}

CELIBERTO, R ^{[1
]}

GORSE, C ^{[1
]}

WINKLER, R ^{[1
]}

WILHELM, J ^{[1
]}

机构：

[1] AKAD WISSENSCH DDR,ZENT INST ELEKTRONENPHYS,BEREICH GASENTLANDUNGSPHYS,GREIFSWALD,GER DEM REP

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1988年 / 21卷 / 05期

关键词：

D O I：

10.1088/0022-3727/21/5/005

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：691 / 699

页数：9

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