MINIATURIZED LIQUID-METAL ION SOURCES (MILMIS)

Introductory remarks are given on liquid metal ion sources (LMIS), and basic features of the latter are outlined. A special by-product of field emission electric space propulsion by a liquid metal ion thruster is the slit emitter, which may be qualified as a semi-miniaturized LMIS. The state-of-the-art technology of field emitter arrays common in Vacuum Microelectronics is presented in view of the fabrication of miniaturized integrated liquid metal ion sources (MILMIS). The possibility of operation of these devices even in the field emission mode as miniaturized liquid metal electron sources (MILMES) is discussed. Finally, an outlook is given on prospective applications of MILMIS and MILMES, including micromachining and microelectronic device technology, e.g. focused ion beam techniques, space technology, e.g. spacecraft neutralizers, and pulsed power technology, e.g. high power switching.