REAL-TIME OPTICAL LEAK TESTING OF MICROELECTRONIC HERMETIC SEALS

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作者：
TYSON, J
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来源：
MATERIALS EVALUATION | 1991年 / 49卷 / 08期
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中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
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页码：970 / 972
页数：3
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