RFQ ACCELERATORS FOR ION-IMPLANTATION

被引：1
|
作者：
SCHEMPP, A
机构：
[1] Institut für Angewandte Physik, J.W. Goethe-Universität, D-6000 Frankfurt/M
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1992年 / 62卷 / 03期
关键词：
D O I：
10.1016/0168-583X(92)95270-2
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Radiofrequency quadrupoles (RFQ) are rf structures which can efficiently accelerate high current ion beams to energies up to 1 McV/u. Features are a strong electrical rf focusing which allows ion beam currents up to 10 mA and a compact and reliable system which is well suited for applications like high energy ion implantation. Examples of RFOs with fixed and variable energy for implantation and the status of work on these implanters will be discussed.
引用
收藏
页码：425 / 430
页数：6
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