PARAMETRIC STUDY OF THE ELECTRICAL TO THERMAL POWER CONVERSION IN AN INDUCTIVELY COUPLED RF PLASMA TORCH

被引：1
|
作者：
PAI, JR
VENKATARAMANI, N
ROHATGI, VK
机构：
来源：
SADHANA-ACADEMY PROCEEDINGS IN ENGINEERING SCIENCES | 1989年 / 14卷
关键词：
D O I：
10.1007/BF02812003
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：121 / 131
页数：11
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