HIGH-RESOLUTION, POSITION-SENSITIVE DETECTOR FOR ENERGETIC PARTICLE BEAMS

被引：1

作者：

MARSH, EP ^{[1
]}

STRATHMAN, MD ^{[1
]}

REED, DA ^{[1
]}

MORSE, DH ^{[1
]}

PONTAU, AE ^{[1
]}

ODOM, RW ^{[1
]}

机构：

[1] SANDIA NATL LABS, LIVERMORE, CA 94550 USA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 77卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(93)95529-E

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The performance and design of an imaging position sensitive, particle beam detector will be presented. The detector is minimally invasive, operates over a wide dynamic range (> 10(10)), and exhibits high spatial resolution. The secondary electrons produced when a particle beam passes through a thin foil are imaged using stigmatic ion optics onto a two-dimensional imaging detector. Due to the low scattering cross section of the 6 nm carbon foil the detector is a minimal perturbation on the primary beam. A prototype detector with an image resolution of approximately 5 mum for a field of view of 1 mm has been reported [R.W. Odom, M.D. Strathman, S.E. Buttrill, Jr., and S.M. Bauman, Nucl. Instr. and Meth. B44 (1990) 465]. A higher resolution detector for imaging small beams ( < 50 mum) with an image resolution of better than 0.5 mum has since been developed and its design is presented.

引用

页码：85 / 91

页数：7

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