TOTAL ORGANIC-CARBON REDUCTION IN ULTRAPURE WATER PROCESSING

被引：0
|
作者：
SINHA, D
机构：
来源：
SOLID STATE TECHNOLOGY | 1992年 / 35卷 / 03期
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暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Total organic carbon (TOC) derived from organics is often the largest source of contamination in ultrapurity water systems. This problem is discussed in the framework of semiconductor processing.
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页码：S9 / S12
页数：4
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