ELEMENTAL COMPOSITION OF BETA-SIC(001) SURFACE PHASES STUDIED BY MEDIUM ENERGY ION-SCATTERING

被引：96
|
作者：
HARA, S
SLIJKERMAN, WFJ
VANDERVEEN, JF
OHDOMARI, I
MISAWA, S
SAKUMA, E
YOSHIDA, S
机构：
[1] WASEDA UNIV,SCH SCI & ENGN,SHINJUKU KU,TOKYO 169,JAPAN
[2] ELECTROTECH LAB,TSUKUBA,IBARAKI 305,JAPAN
来源：
SURFACE SCIENCE | 1990年 / 231卷 / 03期
关键词：
D O I：
10.1016/0039-6028(90)90192-B
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
β-SiC surfaces have been investigated in terms of surface composition and reconstruction by medium energy ion scattering (MEIS), Auger electron spectroscopy (AES), and low energy electron diffraction (LEED). A (3 × 2) phase is produced by evaporating Si on a β-SiC surface. Heat treatment at 1065°C causes consecutive transformation into (5 × 2), c(4 × 2), (2 × 1), (1 × 1) and c(2 × 2) phases. Quantitative analysis of MEIS spectra shows that the c(4 × 2) surface has a full silicon topmost layer, whereas the c(2 × 2) surface has a full carbon topmost layer. The (3 × 2) and (5 × 2) phases are believed to originate from additional Si dimer rows on top of a Si terminated crystal. © 1990.
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页码：L196 / L200
页数：5
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