CALIBRATION STANDARDS FOR SURFACE PROFILE MONITORS

被引：0
|
作者：
HITCHMAN, ML [1 ]
GALE, MT [1 ]
SANDERCOCK, JR [1 ]
机构：
[1] RCA LTD LABS,BADENERSTR 569,CH-8048 ZURICH,SWITZERLAND
来源：
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1980年 / 13卷 / 01期
关键词：
D O I：
10.1088/0022-3735/13/1/003
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：19 / 20
页数：2
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