Influence of traps in gate oxide-Si film transition layers on FD MOSFET's characteristics at cryogenic temperatures

被引:0
|
作者
Lysenko, V. S. [1 ]
Tyagulsky, I. P. [1 ]
Osiyuk, I. N. [1 ]
Nazarov, A. N. [1 ]
机构
[1] NAS Ukraine, V Lashkaryov Inst Semicond Phys, UA-03028 Kiev, Ukraine
关键词
GaAs field-effect transistor; Schottky barrier; CVC;
D O I
暂无
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The results of experiments on the influence of recharging the electron traps in a Si-SiO2 transition layer on the low-temperature characteristics of fully depleted silicon in insulator MOSFET devices are presented. It is shown that the low-dose gamma-radiation improves electrophysical parameters of the transition layer.
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页码:34 / 39
页数:6
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