THEORETICAL-ANALYSIS OF EQUILIBRIUM ADSORPTION LAYERS IN CVD SYSTEMS (SI-H-CL, GA-AS-H-CL)

被引：53
|
作者：
CHERNOV, AA [1 ]
RUSAIKIN, MP [1 ]
机构：
[1] SIBERIAN ENGN PHYS INST,TOMSK,USSR
来源：
JOURNAL OF CRYSTAL GROWTH | 1978年 / 45卷 / 01期
关键词：
D O I：
10.1016/0022-0248(78)90417-7
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
引用
收藏
页码：73 / 81
页数：9
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