STRUCTURE OF CHEMICAL VAPOR-DEPOSITED SILICON-CARBIDE

被引：140
|
作者：
CHIN, J [1 ]
GANTZEL, PK [1 ]
HUDSON, RG [1 ]
机构：
[1] GEN ATOM CO,SAN DIEGO,CA 92138
来源：
THIN SOLID FILMS | 1977年 / 40卷 / JAN期
关键词：
D O I：
10.1016/0040-6090(77)90103-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：57 / 72
页数：16
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