EFFECT OF BACK CONTACT IMPEDANCE ON FREQUENCY-DEPENDENCE OF CAPACITANCE-VOLTAGE MEASUREMENTS ON METAL DIAMOND DIODES

被引：21
|
作者：
VENKATESAN, V [1 ]
DAS, K [1 ]
VONWINDHEIM, JA [1 ]
GEIS, MW [1 ]
机构：
[1] MIT,LINCOLN LAB,LEXINGTON,MA 02173
来源：
APPLIED PHYSICS LETTERS | 1993年 / 63卷 / 08期
关键词：
D O I：
10.1063/1.109834
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Differential capacitance-voltage (C-V) measurements were performed on Al and Pt rectifying contacts fabricated on natural (type IIb) diamonds. The C-V data showed frequency dependence, which decreased significantly after reducing the back contact impedance. The frequency dependence seems primarily to be an effect of the contact capacitance, contact resistance, and bulk resistance of diamond. A model which includes these variables has been proposed to explain this frequency dependence using both large and small back contact impedances.
引用
收藏
页码：1065 / 1067
页数：3
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